Centre for Innovation and New Product Development

Innovations on Process and Product Development

Piezoresistive micro-/nano-cantilever

 

The piezoresistive micro-/nano-cantilever sensor was designed using the CAD tool, Intellsiuite®


The device was fabricated at the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science, Bangalore, through the Indian Nanoelectronics Users Program (INUP) program

 

Doctoral Scholar: Mr. Ribu Mathew

 

Important publications: 

  1. Ribu Mathew and A. Ravi Sankar, “A review on surface stress based miniaturized piezoresistive SU-8 polymeric cantilever sensors,” Nano-Micro Letters, Vol. 10, 1-41, 2018. (Impact Factor – 16.419). 
  2. Ribu Mathew and A. Ravi Sankar, “Design of a triangular platform piezoresistive affinity microcantilever sensor for biochemical sensing applications,” Journal of Physics D: Applied Physics, Vol-48, 205402, 2015 (Impact Factor – 3.207)
  3. Ribu Mathew and A. Ravi Sankar, “Optimization of a nano-cantilever Biosensor for reduced self-heating effects and improved performance metrics,” Journal of Micromechanics and Microengineering, Vol. 28, 085012, 2018. (Impact Factor – 1.881)
  4. Ribu Mathew and A. Ravi Sankar, “Temperature drift-aware material selection of composite piezoresistive micro-cantilevers using Ashby’s methodology,” Microsystem Technologies – Vol. 27, pp- 2647–2660, 2021. (Impact Factor – 2.276)

 

Sponsored Project

A research project titled “Thermal-Drift Aware Modeling and Design of Surface Stress based Micro/Nano Composite Cantilevers with Integrated Piezoresistors for Biosensing Applications”, was funded by SERB, DST for an amount of INR 22, 12,100/- (Twenty-Two Lakh Twelve Thousand One Hundred) for a period of 30 months (February 2017 to July 2019)

 

2) Glass micromachining using Electrochemical Discharge Machining (ECDM)

VITC engraved with a minimum width of around 50 micro-meters

A 3D structure fabricated on a Glass substrate

Cross-sectional view of grooves fabricated on a Quartz substrate using an ECDM process


SEM image of a fabricated planar beam-mass structure with dimensions of 2.5 mm (length) × 2.5 mm (width) × 1 mm (depth)



Optical microscopic images of microchannels fabricated on glass substrates using ECDM processes. The inset pictures in each figure show the focused view of the bottom surface of the microchannels

Doctoral Scholar: Ms. S. Saranya 

 

Important publications: 

  1. S. Saranya and A. Ravi Sankar, “Fabrication of precise micro-holes on quartz substrates with improved aspect ratio using the constant velocity feed drilling technique of an ECDM process,” Journal of Micromechanics and Microengineering – Vol. 28, 125009, 2018 (Impact Factor – 1.881)
  2. S. Saranya and A. Ravi Sankar, “Fabrication of precise microchannels using a side-insulated tool in a spark assisted chemical engraving process,” Materials and Manufacturing Processes, Vol. 33, pp- 1422-1428, 2018 (Impact Factor – 4.616)
  3. S. Saranya, Aswathi Nair, and A. Ravi Sankar, “Experimental investigations on the electrical and 2D-machining characteristics of an electrochemical discharge machining (ECDM) process,” Microsystem Technologies, Vol-23, Issue-5, pp-1453-1461, 2017. (Impact Factor – 2.276)
  4. S. Saranya and A. Ravi Sankar, “Fabrication of micro-mechanical planar cantilever beam-mass structures on quartz substrates using an ECDM process,” Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engg. Manufacture – 2021. (Impact Factor – 2.610)

 

  • Design Optimization of ultra-miniature pressure sensors for biomedical catheters

 

Figure (a) A top view of an ultra-miniature piezoresistive pressure sensor with a zoom-in view of the piezoresistor. The length, width, and thickness of the membrane and piezoresistor are represented as Lm, Wm, Tm and L, W, Tp respectively, and (b) A cross-sectional view of a catheter with a sidewall mounted piezoresistive pressure sensor


Graphical abstract of miniature piezoresistive pressure sensors developed for biomedical catheters

Doctoral Scholar: Ms. K. V. Meena 

 

Important publications: 

  1. K. V. Meena, Ribu Mathew, Jyothi Leelavathi and A. Ravi Sankar, “Performance comparison of a single element piezoresistor with a half-active Wheatstone bridge for miniaturized pressure sensors,” Measurement, Vol-111, pp-340-350, 2017 (Impact Factor – 3.927)
  2. K. V. Meena and A. Ravi Sankar, “Biomedical catheters with integrated miniature piezoresistive pressure sensors: A Review,” IEEE Sensors Journal, vol. 21, no. 9, pp. 10241-10290, 2021 (Impact Factor – 3.301)

K. V. Meena, Ribu Mathew, and A. Ravi Sankar, “Design and optimization of a three-terminal piezoresistive pressure sensor for catheter-based in-vivo biomedical applications,” Biomedical Physics and Engineering Express, Vol. 3, 045003, 2017. (Cite Score – 1.9, Journal published by IoP publishers)